The 9th International Symposium on Measurement Technology
and Intelligent Instruments
Proceedings
of ISMTII-2009
Volume 1
29 June - 2 July, 2009
Saint-Petersburg
In cooperation with
Russian
Corporation of Nanotechnologies
International
Scientific-Technical Society of Instrument Engineers
and Metrologists (ISTS IEM),
The
International Science and
Federal
Agency on Technical Regulating and
Laser
Association, International Scientific-Technical Organization,
Metrological
Siberian
Instrumentation,
Systems and Automation Society (ISA), Russian Section
At the assistance of
Russian
Foundation for Basic Research (RFBR)
Federal Agency for Science and Innovation
Saint-Petersburg Government
National
Natural Science Foundation of
Intertech Corporation
Sponsored by
West-Siberian
Railroad of the
Russian
Corporation of Nanotechnologies
The
International Science and
Sartorius
Company,
SIOS
Company,
Inversion
Fiber Ltd,
SIBECOPRIBOR
– Production-Ecological Enterprise, Ltd,
VMK
Optoelektronika Ltd,
JSC
Endorsed by
The Chairmen of Technical
Committees TC2, TC7 and TC14 of IMEKO
(International Measurement Confederation)
Greetings
to ISMTII 2009
On behalf of The International Committee on Measurements and
Instrumentation (ICMI), I would like to express my congratulations to the
successful opening of the 9th International Symposium on Measurement Technology
and Intelligent Instruments (ISMTII 2009) to be held from June 29 to July 2,
2009.
ISMTII 2009 was chosen to be held in
Twenty years ago, Professor LI Zhu organized the first ISMTII in
In the end, I would like to express my appreciation to all the participants of ISMTII 2009. Without your participation, the conference would not be successful. The next ISMTII will be organized by our Korean colleagues in 2011, under the leadership of Professor Seung-Woo Kim. I beg your continuous support to ICMI and the coming ISMTII conferences.
Let’s enjoy ISMTII 2009 ! Let’s enjoy the beautiful city Saint-Petersburg !
Professor Wei Gao
Chair of ICMI
Preface
On behalf of the Organizers, Steering Committee and International
Program Committee I would like to thank all the participants for their great
contributions to the Proceedings of the 9th International Symposium
on Measurement Technology and Intelligent Instruments (ISMTII-2009), as well as
the reviewers for their careful expertise of the papers.
The ISMTII
Symposia have been successfully held every two years from
The Co organizers of this event are ICMI, VNIIM, SB RAS, D.S. Rozhdestvensky Optical Society, SPbSU ITMO, SPbSPTU, Scientific and Industrial Corporation “Vavilov State Optical Institute”.
The ISMTII-2009 Symposium focuses in measurement science and metrology: micro- and nano- measurements; nano-photonics, novel measurements and diagnostic technologies, including nondestructive and dimensional inspection; terahertz technologies for science, industry, and biomedicine; intelligent measuring instruments and systems for industry and transport; measurements and metrology for the humanitarian fields; education in measurement science. Participation in this Symposium located in famous Saint-Petersburg, which from its foundation is a unique communication bridge between countries of all continents, is a very good opportunity for the exchange of experience, information and knowledge between the specialists from different fields.
There were 410
abstracts submitted to the Symposium from 30 countries and regions around the
world, including
We hope this Symposium will further promote the development of measurement technology and intelligent instruments and will stimulate the work in these fields, help to initiate joint projects and renew scientific and personal contacts between Russian and foreign counterparts.
I would like to thank Prof. Li Zhu, Prof. Yongsheng Gao, and Prof. Wei Gao for their fruitful discussions and great assistance.
Professor Yuri Chugui
Chair of ISMTII-2009
ISMTII-2009
Committee Members
|
Symposium Chairman: |
Prof. Yuri Chugui ( |
|
Honorary
Chairman: |
Prof. Zhu Li (Wuhan,
China) |
Steering
Committee
|
Prof.
Valery Aleksandrov ( Mr. James
Bryan ( Prof. Kuang-Chao Fan (
|
|
Prof.
Heui-Jae Pahk ( Academician Vladislav Panchenko ( Prof. Bala
Krishna Ramamoorthy ( Prof. Paul Regtien (The Prof.
Ksenia Sapozhnikova ( Dr. Masaji
Sawabe ( Prof.
Junfeng Song ( Prof.
Jiu-bin Tan ( Prof.
Kiyoshi Takamasu ( Prof.
Roald Taymanov ( Prof. Theo
Tschudi ( Prof. Fei
Yetai ( Prof.
Guobiao Wang ( Prof.
Albert Weckenmann ( Prof. David Whitehouse (
|
International
Program Committee
|
Chairmen: Prof. Vladimir
Vasiliev, SPbSU ITMO ( |
|
Prof. Yuri Chugui, TDI SIE SB RAS ( |
|
Dr. Ossama Badie Abouelatta (Egypt) Prof. Ahmed Abou-Zeid ( Prof. Armando Albertazzi (Brazil) Prof. Valery Aleksandrov (Russia) Prof. Oleg Angelski (Ukraine) Prof. Edmund Akopov (Russia) Academician Alexander Aseev ( Prof. Anand Asundi ( Prof. Sergey Babin ( Academician
Sergey Bagayev ( Prof.
Hartmut Bartelt ( Dr. Harald
Bosse ( Academician
Alexander Bugaev ( Prof.
Victor Bykov ( Prof. Ming Chang ( Dr. Shuo-Hung Chang ( Dr. Fong-Zhi
Chen (Taiwan, China) Dr. Ga-Lane Chen (Taiwan, China) Prof.
Liang Chia Chen ( Prof. Steen G. Hanson (Denmark)
Prof. Gerd Häusler (Germany)
Prof. Manus Patrick Henry ( Dr. Konrad
Herrmann (Germany) Prof. Robert
J. Hocken (USA) Dr. Sherif E.
Hussein (Egypt) Prof.
Vyacheslav Ivanov (Russia) Prof. Ryszard Jablonski (Poland)
Prof. Leszek Jaroszewicz (Poland)
Dr. XiaoJun Liu (China) Dr. Otto Jusko (Germany) Prof. Wen-Yuh Jywe (
|
|
Prof.
Boris Chichkov ( Dr. Benny
Cheung ( Dr. Gustavo Daniel Donatelli (Argentina) Prof. Yuri Dubnishchev (Russia) Prof. Illes Dudas (Hungary) Prof. Numan Durakbasa (Austria) Cor.
member Mikhail Fedorov ( Prof. Ludwik Finkelstein (UK) Prof. Ivan Frollo (Slovakia) Prof. Mauricio Nogueira Frota (Brazil)
Prof. Ryoshu Furutani (Japan)
Prof. Sergey Garnov (Russia)
Prof. Vladimir Golubev (Russia)
Prof. Meng Guang (China)
Prof. Vladimir Gushov (Russia)
Dr. Han Haitjema (The Netherlands)
Dr. Howard Harary (
|
Publication
Committee
|
Prof.
Yongsheng Gao ( Prof.
Kuang-Chao Fan ( Dr. Vladimir Arpishkin (Russia)
Prof. Wei Gao (Japan) Prof.
Volker H. Hans ( Prof. Geny
Kavalerov ( |
|
Prof.
Vladimir Kneller ( Prof. Sergey Muravyov ( Prof.
Ksenia Sapozhnikova ( Dr.
Mikhail Stupak ( Prof.
Roald Taymanov ( Prof. Sergei Yurish ( |
Organizing
Committee
|
Chairman, Symposium Scientific Secretary: |
|
Dr. Mikhail Stupak, TDI SIE SB RAS ( |
|
|
|
Co-Chairman: |
|
Dr.
Vladimir Arpishkin, D.S. Rozhdestvensky Optical
Society ( |
|
|
|
Prof. Victor Zverev, SPbSU
ITMO ( |
|
Prof. Victor Medunetsky, SPbSU ITMO ( |
|
Prof. Igor Konyakhin, SPbSU
ITMO ( |
|
Prof. Vyacheslav Shkodyrev, SPbSTU ( |
Prof. Svyatoslav Latiev, SPbSU ITMO (
|
Prof. Anna Chunovkina, VNIIM (
|
|
Dr. Vladimir Obraztcov, FGUP NIIKI OEP (Sosnovy Bor, Leningrad
region, Russia) |
|
Prof. Oleg Ushakov, SSGA ( |
|
Prof. Vadim Privalov, SPbSTU
( |
|
Dr. Irina Zabelina, D.S.
Rozhdestvensky Optical Society ( |
|
Dr. Alexander Kharuto, Moscow
Conservatory, |
Mrs. Tatiana Ivanchenko, TDI SIE SB RAS (
|
Mrs. Elena Arsenina, TDI SIE SB RAS (
|
Prof. Irina Palchikova, TDI SIE SB RAS (
|
Mrs. Tatiana Toropchina, TDI SIE SB RAS (
|
|
Mrs. Anastasiya Yunosheva, TDI SIE SB RAS
( |
CONTENTS
|
|
|
|
Orthogonally polarized dual frequency lasers and applications in self-sensing Shulian Zhang,
Yidong Tan |
XIV |
|
Computed
tomography for application in manufacturing metrology...................... Albert
Weckenmann, Philipp Krämer |
XXI |
|
A scanning contact probe for micro CMM................................................................ Kuang-Chao Fan, Fang
Cheng, Weili Wang, Yejin Chen, Jia-You Lin |
XXVIII |
|
Nanomeasuring and Nanopositioning Technology Gerd Jäger |
XXXIII |
|
The impact of micro and nano sensors in
biomedical measurement....................... Peter Rolfe |
XXXIX |
|
Boris A.
Knyazev, Gennady N. Kulipanov, et al |
XLIV |
|
Fast
measuring technologies for ultra-precision
manufacturing............................ Wei Gao, Yoshikazu Arai, Yusuke Saito, Akihide Kimura and Takemi Asai |
XLIX |
|
The evolution of surfaces and their measurement.................................................... Xiangqian Jiang |
LIV |
|
Vladimir M. Petrov |
LXI |
|
Nano- and micrometrology in PTB: state of the
art and future challenges............ Harald Bosse, L. Koenders, F. Härtig, E.
Buhr, G. Wilkening |
LXVI |
|
Topical tasks of metrology due
to measuring instruments computerization........... Valery S. Aleхandrov, Roald E. Taymanov, Anna G. Chunovkina |
LXXI |
|
|
|
|
|
|
|
Invited
Papers |
|
|
Michael Krystek |
1-001 |
|
Uncertainty
evaluation for coordinate metrology by
intelligent measurement......... Kiyoshi Takamasu, Satoru Takahashi, Wang Tao, Ryoshu Furutani |
1-006 |
|
Dante
J. Dorantes-Gonzalez, Xiaotang Hu |
1-011 |
|
Papers |
|
|
Correct treatment of systematic errors in the evaluation
of measurement uncertainty................................................................................................................. F. Härtig, M. Krystek |
1-016 |
|
Direct measurement technique
of plumb-lines deflection.......................................... Eugene V. Konkov |
1-020 |
|
Optical
signal parameters maximum likelihood estimator and Cramer-Rao bounds........................................................................................................................... Victor S. Sobolev, Sergey V. Khabarov |
1-024 |
|
Phase and group
refractive index of optical waves for precision measurements..... Alexander P. Karpik,
Alexander V. Koshelev |
1-027 |
|
Counting method for calibration and linearity
checking of photometry devices...... Eduard V. Kuvaldin |
1-031 |
|
Anna G. Chunovkina,
Valery A. Slaev |
1-036 |
|
Dynamic calibration
of pressure
sensors at low frequencies using
liquid step
pressure
generator with special spool
valve........................................................................... Sheng-Hung Wang, L.L. Han, and T.T. Tsung |
1-041 |
|
Traceable
large-scale metrology based on laser
tracker........................................... Zhang FuMin, Qu XingHua, Wu HongYan |
1-046 |
|
Robert Schmitt,
Susanne Nisch |
1-051 |
|
Modern laser
technologies for metrological
applications........................................... Bronislav S.
Mogilnitsky |
1-056 |
|
Multivariant system of perspective.............................................................................. Aristarkh M. Kovalev |
1-061 |
|
|
|
|
|
|
|
Invited Papers |
|
|
Metrological and standardization
base of nanotechnologies..................................... Pavel A. Todua |
1-066 |
|
Yasuhiro Takaya, Masaki
Michihata, Terutake Hayashi |
1-072 |
|
NT-MDT
for innovations instruments engineering.................................................... Victor Bykov, Vladislav Polyakov,
Vladimir Kotov, Andrei Bykov, Andrei Shubin |
1-077 |
|
Testing
aspheric lenses: some new approaches with increased
flexibility................. Wolfgang Osten, Eugenio
Garbusi, Christoph Pruss, Lars Seifert |
1-082 |
|
Precision measuring in
nanoscale range...................................................................... Alexander V. Latyshev |
1-089 |
|
3D micro- and nanofabrication using femtosecond
lasers......................................... Boris N. Chichkov, Roman Kiyan |
1-096 |
|
Papers |
|
|
Victor V. Ivanov |
1-097 |
|
Fabrication
of large grating by monitoring the latent fringe
pattern....................... Lijiang Zeng,
Lei Shi, and Lifeng Li |
1-098 |
|
Development of a closed-loop micro-/nano-positioning
system embedded with Fang-Jung
Shiou, Chao-Jung Chen, Shu-Chung Liao,
Huay-Chung Liou |
1-103 |
Nanotechnology of creation of quantum points from the ultra-cold atoms of hydrogen
E.K. Izrailov, К.Е. Izrailov |
1-108 |
|
Measurement and
visualization of dynamics
of piezoelectric
microcantilever.......... Weijie Dong, Mengwei Liu, Cui Yan |
1-113 |
|
Yuriy N. Kulchin, Oleg B. Vitrik, Alexey D. Lantsov,
Natalya P. Kraeva |
1-118 |
|
Measurement of pretravel distance of nano-CMM
probe......................................... Fang Cheng, Yetai Fei, Kuang-Chao Fan, Yuanzhong Lei |
1-123 |
|
Motif parameters based
characterization
of line
edge
roughness(LER) Zhuangde Jiang, Fengxia Zhao, Weixuan Jing, Philip
D. Prewett, and Kyle Jiang |
1-128 |
|
Vladimir
Katkovnik, Artem Migukin, Jaakko Astola, and Karen Egiazarian |
1-133 |
|
Precision inspection of glass ceramics surface
topology............................................. Valery V. Besogonov, Irina N. Skvortsova |
1-138 |
|
Multi-wavelength angle-resolved
reflectometer for thickness and refractive index measurement of thin-film
structures........................................................................... Woo-Deok Joo, Joonho You, and Seung-Woo Kim |
1-142 |
|
Model-based correction of
image distortion in scanning electron microscopy......... D. Gnieser, C.G. Frase, H. Bosse and R. Tutsch |
1-147 |
|
Victor N. Fedorinin,
Andrei G. Paulish |
1-152 |
|
Microrelief
measurements for white-light interferometer with adaptive algorithm
interferogram processing............................................................................................ Evgeny V. Sysoev, Rodion V. Kulikov |
1-157 |
|
Evgeny
V. Sysoev |
1-162 |
|
Interrelation
of metrology and nanotechnology with intellectual property rights... L. Kraeuter, M.N. Durakbasa, P.H. Osanna |
1-167 |
|
Calibration methods for
nanometer scale measuring instruments............................ Wenhao Huang, Yuhang Chen, Jiawen Li |
1-172 |
|
Design and analysis of 6-DOF monolithic nanopositioning stage............................... Lingli Cheng, Jianwei Yu,
Xiaofen Yu |
1-173 |
|
Ultraviolet
nanosecond pulse laser 3D micro-fabrication system.............................. Chunyang Liu, Xing Fu, Yong Wu, Fengming
Sun, Xiaotang Hu |
1-178 |
|
Chen Zhi, Hu Xiaodong, Fu Xing, Hu
Xiaotang, Gao Sitian |
1-182 |
|
In situ mechanical property measurement of
titania nanowires............................... M. Chang,
J.R. Deka, C.H. Lin, C.C. Chung |
1-187 |
|
Analysis on heterodyne
signals in apertureless scanning near-field optical microscopy.................................................................................................................... Chin-Ho
Chuang and Yu-Lung Lo |
1-192 |
|
X.D. Wang, D.S. She, X.W. Zhang, T. Wang, L.D. Wang |
1-197 |
|
Development of the
equipments for nano photonic crystal....................................... Wen-Yuh Jywe, Chien-Hung
Liu, Shang-Liang Chen, Tung Hsien Hsieh, Li-Li Duan, Chen-Hua She |
1-202 |
|
Image restoration used for detection of confocal
microscope.................................. Huang
Xiangdong, Xing
Benfeng, Cui Junning |
1-207 |
|
Differential confocal microscopy with center shaded filter based on
polychromatic illumination................................................................................................................... Jian Liu, Jiu-bin Tan, Yu-hang Wang |
1-211 |
|
|
|
|
|
|
|
Invited Papers |
|
|
Nanotrace:
the investigation of non-linearity in optical interferometers using
X-ray interferometry......................................................................................... Andrew Yacoot, Marco
Pisani, Gian Bartolo Picotto, Ulrich Kuetgens, Jens Flügge, Petr Kren, Antti Lassila, Santeri Seppä, Ramiz Hamid, Mehmet Celik, Michael Matus, Anton Nießner |
1-216 |
|
Robert Schmitt, Christian Niggemann |
1-221 |
|
Novel X-ray imaging using a CdTe sensor................................................................ Hidenori
Mimura, Yoichiro
Neo and Toru Aoki |
1-226 |
|
Papers |
|
|
Measurement of period
difference in grating pair based
on analysis of grating phase
shift................................................................................................................... Chao Guo, Lijiang Zeng |
1-231 |
|
Double-sided interferometer with low drift for
stability testing............................ Jonathan D. Ellis, Ki-Nam Joo, Jo W. Spronck, and
Robert H. Munnig Schmidt |
1-236 |
|
Compact signal processing with position sensitive detectors utilized
for Michelson interferometer............................................................................................................ Lih-Horng
Shyu, Yung-Cheng Wang, Jui-Cheng Lin |
1-241 |
|
James D. Trolinger, Amit Lal, Joshua Jo, and Stephen
Kupiec |
1-246 |
|
A simple heterodyne laser interferometer without
periodic errors....................... Ki-Nam Joo, Jonathan D. Ellis,
Jo W. Spronck, Paul J. M. van Kan and Robert H. Munnig Schmidt |
1-251 |
|
Achieving traceability of
industrial computed tomography.................................... Markus Bartscher, Marko
Neukamm, Uwe Hilpert, Ulrich Neuschaefer-Rube, Frank Härtig, Karin Kniel,
Karsten Ehrig, Andreas Staude, Jürgen Goebbels |
1-256 |
|
Research on the vibration resistance ability of the
random phase-shifting interferometry............................................................................................................. Qun Hao, Qiudong Zhu, Lei
Tang |
1-262 |
|
High-resolution
dimensional metrology for industrial applications....................... Thilo Schuldt, Martin Gohlke,
Dennis Weise, Achim Peters, Ulrich Johann, Claus Braxmaier |
1-267 |
|
A. |
1-272 |
|
Shyh-Tsong Lin and Zhi-Feng Lin |
1-277 |
|
Developments in homodyne
interferometry............................................................. Walter
Schott |
1-282 |
|
Irina G. Palchikova, Ivan А. Yurlagin |
1-287 |
|
Liang-Chia Chen, Abraham Mario Tapilouw,
Sheng-Lih Yeh, Shih-Tsong
Lin, Yi-Shiuan Lin |
1-292 |
|
The compensation of
tilt angles and verification of displacement measurements with Fabry-Perot
interferometer............................................................................ Yung-Cheng Wang, Lih-Horng Shyu,
Wen-Yuh Jywe, Bean-Yin Lee |
1-297 |
|
Ultrasonic interferometer for high-accuracy linear
measurements...................... Eugene V. Konkov |
1-300 |
|
Spatial phase-shifting
moiré tomography............................................................... Song Yang, Zhao Zhimin, Chen
YunYun, He Anzhi |
1-303 |
|
Improvement on measuring
optical nonlinear phase shift by self-aligned
interferometer................................................................................. Chongxiu
Yu, Bing Liu,
Xiangjun Xin, Xinzhu Sang, Jinhui Yuan |
1-309 |
|
About the peculiarities of the polarization approach
to the measuring of optical field
correlations..................................................................................... Oleg V. Angelsky, Sergij
B. Yermolenko, Claudia Yu. Zenkova, Alla O. Angelskaya |
1-314 |
|
Multi-channel adaptive interferometry system...................................................... Roman Romashko, Yuri Kulchin, Salvatore Di Girolamo, and Alexei Kamshilin |
1-319 |
|
Feedback interferometry
with frequency modulation.......................................... Victor S. Sobolev, Galina A. Kashcheeva |
1-323 |
|
One-shot surface profile measurement using
polarized phase-shifting............... Terry Yuan-Fang Chen and Yi-Liang Du |
1-328 |
|
Modeling software for
industrial computed tomography problems.................... Yuri V. Obidin, Konstantin V.
Petukhov, Vladimir Y. Sartakov |
1-333 |